![High-energy heavy ion microprobe](/sites/default/files/styles/thumbnail/public/2021-03/High-energy-heavy-ion-microprobe-v2.jpg?itok=SqAyiLef)
High-energy heavy ion microprobe
The high-energy heavy-ion microprobe is used for the characterisation or modification of material properties at depths from approximately 1 micrometre to maximum depths of up to 500 micrometres from the material surface.