![High-energy heavy ion microprobe](/sites/default/files/styles/thumbnail/public/hero-images/High-energy%20heavy%20ion%20microprobe.jpg?itok=EkAEcci8)
High-energy heavy ion microprobe
The high-energy heavy ion microprobe is used for the characterisation or modification of material properties at depths from approximately 1 micrometre to maximum depths of up to 500 micrometres from the material surface.